Vacuum processing apparatus and transportation system thereof

Details Vacuum processing apparatus and transportation system thereof Vacuum processing apparatus and transportation system thereof

1991-11-22

1992-12-15

Oberleitner, Robert J.

Railways

Magnetically suspended car

Propulsion means employed to suspend car

198619, 104292, B60L 1304

Patent

active

051707144

ABSTRACT:
A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.

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