Vacuum processing apparatus and transportation system thereof

Details Vacuum processing apparatus and transportation system thereof Vacuum processing apparatus and transportation system thereof

1989-06-13

1992-02-11

Hoag, Willard E.

Coating apparatus

Gas or vapor deposition

Work support

118 50, 118500, 198619, 318135, 414217, B05C 309, B60L 1304, B60L 1310

Patent

active

050867296

ABSTRACT:
A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.

REFERENCES:
patent: 3845720 (1974-11-01), Bohn et al.
patent: 3863574 (1975-02-01), Thomas
patent: 3895585 (1975-07-01), Schwarzler
patent: 3899979 (1975-08-01), Godsey
patent: 4392435 (1983-07-01), Moody et al.
patent: 4540326 (1985-09-01), Southnorth et al.
patent: 4576828 (1986-03-01), Walker
patent: 4619573 (1986-10-01), Rathman et al.
patent: 4624617 (1986-11-01), Belna
patent: 4664578 (1987-05-01), Kakehi
patent: 4686435 (1987-08-01), Heidelberg et al.
patent: 4690066 (1987-09-01), Morishita et al.
patent: 4766993 (1988-08-01), Kita et al.
patent: 4817533 (1989-04-01), Azukizawa et al.
patent: 4825773 (1989-05-01), Morishita et al.
patent: 4877123 (1989-10-01), Fukuwatari et al.

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