Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for passing discrete workpiece through plural...
Reexamination Certificate
2005-01-18
2005-01-18
Hassanzadeh, Parviz (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With means for passing discrete workpiece through plural...
C156S345310, C156S345290, C118S719000, C414S939000, C204S298250, C204S298270, C204S298350
Reexamination Certificate
active
06843883
ABSTRACT:
A vacuum processing apparatus50is provided with a bypass line52for causing a vacuum transfer chamber4and a load-lock chamber12to communicate with each other, and a bypass opening and shutting valve54for opening and shutting the corresponding bypass line52, wherein by opening the bypass opening and shutting valve54, a pressure-reduced state at the vacuum transfer chamber4side can be shifted to the load-lock chamber12side, and the pressure reduction of the load-lock chamber12can be carried out in a short time.
REFERENCES:
patent: 4675096 (1987-06-01), Tateishi et al.
patent: 4699585 (1987-10-01), Giese et al.
patent: 4824545 (1989-04-01), Arnold et al.
patent: 5433785 (1995-07-01), Saito
patent: 6074202 (2000-06-01), Yagi et al.
patent: 20030102084 (2003-06-01), Livesay et al.
patent: 4401718 (1975-08-01), None
patent: 58078357 (1983-05-01), None
patent: 01050414 (1989-02-01), None
patent: 02081457 (1990-03-01), None
patent: 08-097126 (1996-08-01), None
patent: 2000-313959 (2000-11-01), None
Ishizaki Hideki
Kosuda Masanori
Tamagawa Yoshihisa
Hassanzadeh Parviz
Moore Karla
Oliff & Berridg,e PLC
TDK Corporation
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