Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2008-08-29
2011-10-11
Rudawitz, Joshua (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S936000
Reexamination Certificate
active
08033770
ABSTRACT:
A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
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Kai Yoshitaka
Minami Shigeharu
Nakata Kenji
Okiguchi Shoji
Oomae Hidehiro
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Rudawitz Joshua
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