Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

2009-10-14

2011-12-13

Lund, Jeffrie R (Department: 1716)

Coating apparatus

Gas or vapor deposition

C294S081100, C294S081540, C156S345100

Reexamination Certificate

active

08075691

ABSTRACT:
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.

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Office Action issued in U.S. Appl. No. 12/578,796 dated Jul. 14, 2011.
Office Action dated Oct. 19, 2009 for U.S. Appl. No. 11/346,621.

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