Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

2005-12-09

2009-11-03

Bastianelli, John (Department: 3753)

Valves and valve actuation

With actuation lubricating means

C414S217000, C414S935000

Reexamination Certificate

active

07611124

ABSTRACT:
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.

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