Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

2007-11-20

2007-11-20

Jacyna, J. Casimer (Department: 3754)

Valves and valve actuation

Reciprocating valve

Gate

C251S193000

Reexamination Certificate

active

11073652

ABSTRACT:
An inexpensive and reliable vacuum processing apparatus is provided. The vacuum processing apparatus comprises a sealed gate located between two vacuum vessels for allowing them to communicate with each other and a sample subjected to processing to be transferred from one of the vacuum vessels to the other therethrough; and a gate valve located on a path of the gate, the gate valve including a first and second valve body facing a first and second opening, respectively, and a shaft to which the valve bodies are coupled at one end thereof, the gate valve selectively opening and closing each of the openings. The gate valve includes an axial drive section coupled to the other end of the shaft for moving the shaft in the axial direction thereof, and a rotary drive section located between the one end and the other end of the shaft for rotating the shaft about a predetermined pivot crossing the axis of the shaft. The rotating force is transmitted to a spot on the shaft between the pivot and the other end along the axis of the shaft.

REFERENCES:
patent: 4381100 (1983-04-01), Schoenberg
patent: 6390448 (2002-05-01), Kroeker et al.
patent: 2004/0129910 (2004-07-01), Ishigaki
patent: 2002-9125 (2002-01-01), None

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