Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

1998-09-03

2000-07-25

Bennett, Henry

Drying and gas or vapor contact with solids

Apparatus

Vacuum

34278, 432245, F26B 1330

Patent

active

060922990

ABSTRACT:
A present vacuum treating apparatus comprises a process chamber for subjecting an object to a predetermined process in a predetermined vacuum state, a stage located in the process chamber and on which the object is placed, a lamp unit provided at the lower side of the processing chamber and having a plurality of lamps as a light source and adapted to heat the object on the stage by a heat energy of light directed from these lamps to the stage for illumination, a rotation shaft connected to the lamp unit to rotate the lamp unit, a support body rotatably supporting the rotation shaft, and a thermo-module provided at a contacting area of the support body selective to the rotation shaft and, by absorbing heat on its rotation shaft side and dissipating heat on its support body side, transferring the heat on the lamp unit to the support body through the rotation shaft.

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