Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

1985-02-26

1987-01-20

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118724, 118729, 118730, 118733, 118 50, C23C 1308

Patent

active

046373420

ABSTRACT:
A vacuum processing apparatus for applying a vacuum working process to a substrate to be processed by a plurality of processing steps comprises vacuum containers exclusively for use for processing disposed in place for each of the processing steps, and a vacuum container exclusively for use for conveyance movable between the vacuum containers exclusively for use for processing. The vacuum containers are provided with opening-closing gates which can be connected to each other. The substrate to be processed is transferably movable between the vacuum containers exclusively for use for processing and the vacuum container exclusively for use for conveyance.

REFERENCES:
patent: 3915117 (1975-10-01), Schertler

Affiliated with

Also associated with

Rating

Vacuum processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2129545