Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1985-09-06
1987-10-13
Spar, Robert J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414225, A61K 2702, C23C 1500
Patent
active
046995544
ABSTRACT:
This invention is directed to a vacuum processing apparatus which is constructed so that a sample may be carried between a main vacuum chamber and a portion of the atmosphere outside the main vacuum chamber while the sample is retained in a vertical position. The sample is carried in the vertical position through several chambers, including a first vacuum preparatory chamber provided to be communicable with the main vacuum chamber and a second vacuum preparatory chamber provided to be communicable with both the first vacuum preparatory chamber and the atmosphere. By using this apparatus, and in particular by conveying the sample in a vertical position, it is possible to restrain the adhesion of foreign substances on the sample surface which is to be treated. It is also possible to reduce the vacuum load and properly maintain pressure within the main vacuum chamber, thereby enabling increased quality of treatment and also enhancing the manufacturing yield of a semiconductor element.
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patent: 4405435 (1983-09-01), Tateishi
patent: 4498832 (1985-02-01), Corville
patent: 4548699 (1985-10-01), Hutchison et al.
patent: 4553069 (1985-11-01), Purser
patent: 4584045 (1986-04-01), Richards
Ichihashi Kazuaki
Kawashima Sosuke
Hitachi , Ltd.
Millman Stuart J.
Spar Robert J.
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