Vacuum process apparaus

Details Vacuum process apparaus Vacuum process apparaus

1996-06-03

1997-03-11

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118724, 118725, 118729, 156345, 414217, 414939, C23C 1600, H01L 2100

Patent

active

056096895

ABSTRACT:
A cooling table for cooling a processed object of process in a vacuum reserve chamber is provided with support members, which support the object with predetermined gaps between the object and the table, so that the processed object can be cooled without directly touching the cooling table. Accordingly, no chemical reactions attributable to the plane contact between the object of process and the cooling table can be caused, so that the object cannot be contaminated. Even if the object is somewhat warped and subjected to fine vibrations by rapid cooling, moreover, it never rubs against the cooling table, so that no particles can be produced. Further, a preheating device for preheating the unprocessed object is provided overlying the cooling table. Thus, the vacuum reserve chamber can be used for preheating the unprocessed object as well as for cooling the processed object, so that the throughput can be improved.

REFERENCES:
patent: 5512320 (1996-04-01), Turner
patent: 5516732 (1996-05-01), Flegal

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