Bearings – Linear bearing – Fluid bearing
Reexamination Certificate
2007-11-06
2007-11-06
Footland, Lenard A. (Department: 3682)
Bearings
Linear bearing
Fluid bearing
Reexamination Certificate
active
11182193
ABSTRACT:
A pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing comprises a bearing body having an active surface divided into a lift portion and a pre-load portion. A plurality of gas distribution channels are formed in the bearing body, wherein a first channel receives a compressed gas, a second channel supplies a vacuum to the pre-load portion of the active surface, and a third channel supplies a positive pressure gas to the lift portion of the active surface. The bearing body has an integral, pneumatically powered, vacuum generator having an inlet coupled to the first channel, a vacuum aperture coupled to the second channel, and an exhaust. The compressed gas may be supplied to the lift portion of the active surface either in parallel, in series, or in a series-parallel configuration, with the integrated vacuum generator. In an embodiment, the pneumatic bearing is reconfigurable.
REFERENCES:
patent: 5839324 (1998-11-01), Hara
patent: 2004/0161179 (2004-08-01), Zywno
patent: 2005/0129339 (2005-06-01), Sai et al.
del Puerto Santiago E.
Wardman Geoffrey B.
ASML Holding N.V.
Footland Lenard A.
Sterne Kessler Goldstein & Fox PLLC
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