Vacuum pickup apparatus

Details Vacuum pickup apparatus Vacuum pickup apparatus

1983-05-20

1986-08-05

Spar, Robert J.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294907, 901 35, 901 45, 414404, 414416, 414730, 414732, 414737, B65G 1732

Patent

active

046038973

ABSTRACT:
Apparatus that uses a suction engagement element to transport semiconductor wafers between processing boats and detects when suction engagement has not occurred despite the engagement element having been moved toward a wafer a distance sufficient to enable said engagement, and then adjusts the position of the engagement element relative to the object (e.g., by backing up and trying again or by pivoting the engagement element) to facilitate the suction engagement.

REFERENCES:
patent: 3054036 (1962-09-01), Lenk et al.
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3697112 (1972-10-01), Nielson et al.
patent: 3881605 (1975-05-01), Grossman
patent: 4156835 (1979-05-01), Whitney et al.
patent: 4166543 (1979-09-01), Dahlstrom
patent: 4178113 (1979-12-01), Beaver, II et al.
patent: 4266905 (1981-05-01), Birk et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4356554 (1982-10-01), Susnjara et al.
patent: 4392766 (1983-07-01), Blunt
patent: 4513957 (1985-04-01), Schaefer, Jr.
Garrison et al., Pneumatic Touch Sensor, IBM Technical Disclosure Bulletin, vol. 16, No. 6, Nov. 1973, pp. 2037-2040.
Mongodin, Semiconductor Production, New Automatic Wafer for Semi Standard Plastic Carriers, Autumn 1980, pp. 30-33.

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