Vacuum particle detector

Details Vacuum particle detector Vacuum particle detector

1991-10-16

1993-11-16

Rosenberger, Richard A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356336, 250574, G01N 2100

Patent

active

052628418

ABSTRACT:
A vacuum particle detector includes a cavity providing a passage for fluid flow, a laser diode and beam shaping optics to form a substantially rectangular beam spanning the chamber. Light sensing optics, including a pair of biconvex lenses, receive light scattered when the particles suspended in the fluid intersect the beam. At least some of the scattered light is transmitted through the lenses to a photodetector. The photodetector width is selected in concert with the focal lengths of the biconvex lenses, to provide a viewing depth of field commensurate with the complete span of the beam across the chamber, whereby the photodetector responds to particles that intersect the beam over the entire span. A cone and a surrounding sleeve, both concentric about an axis of the beam, absorb the laser energy beam to provide an effective beam stop.

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"Benefits of Real-Time, In-Situ Particle Monitoring in Production Medium Current Implantation", Peter G. Borden and Lawrence A. Larson.

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