Vacuum oven chamber for making laminated integrated circuit devi

Details Vacuum oven chamber for making laminated integrated circuit devi Vacuum oven chamber for making laminated integrated circuit devi

1996-05-29

1998-06-30

Sells, James

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

Automatic and/or material-triggered control

156359, 156382, 156498, 1565831, B30B 1534

Patent

active

057728356

ABSTRACT:
An oven for making laminated integrated circuit cubes includes an oven chamber with at least one access opening. A closure member for the access opening is capable of hermetically sealing the chamber. A hermetic connection is provided for supplying power to within the chamber. Structure permits the withdrawal of air and other gases from within the chamber. Hermetic structure permits the application of a press force to a workpiece within the chamber from an actuator outside the chamber. Hermetic temperature sensing devices measure the temperature of a workpiece within the chamber.

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