Vacuum operated wafer transfer apparatus

Details Vacuum operated wafer transfer apparatus Vacuum operated wafer transfer apparatus

1989-04-27

1993-11-16

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414417, 414404, 414217, 414620, 414222, 187 17, 118719, 901 47, B65G 6500

Patent

active

052617769

ABSTRACT:
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer grips which hold the wafers until the wafer platform is lowered and a second wafer about is in position to receive the wafers. The wafer platform is actuated by the negative pressure applied to alternating sides of a stage which divides a sealed cabinet into two portions. A vacuum is applied to alternating sides of the stage, while ambient air is introduced into the other side, causing the stage to move in the direction of lower pressure. The platform is affixed to the stage on at least two points.

REFERENCES:
patent: 2927661 (1960-03-01), Kristek et al.
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4566841 (1986-01-01), Ohmura
patent: 4568234 (1986-02-01), Lee et al.
patent: 4573851 (1986-03-01), Butler
patent: 4616683 (1986-10-01), Tullis et al.
patent: 4695217 (1987-09-01), Lau
patent: 4763941 (1988-08-01), Sniderman
patent: 4781511 (1988-11-01), Harada et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4856957 (1989-08-01), Lau et al.

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