Vacuum monitoring apparatus

Details Vacuum monitoring apparatus Vacuum monitoring apparatus

1987-02-18

1988-07-05

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

With sample supply means

250281, 31511191, B01D 5944

Patent

active

047556692

ABSTRACT:
The invention provides a wide range pressure gauge comprising a thermal-conductivity gauge and a high-vacuum total or partial pressure gauge such as a hot-cathode ionization gauge or a residual gas mass spectrometer, mounted from a common flange. In order to allow the use of a filament (3) shorter than those conventionally used in thermal conductivity pressure gauges, means (49-54) are provided to maintain the filament temperature substantially constant over its entire pressure range. Pressure is measured by means (51, 52, 56-58) adapted to measure the power dissipated in the filament (3).

REFERENCES:
patent: 2758233 (1956-08-01), Nelson
patent: 3267326 (1966-08-01), Hayward et al.
patent: 3319117 (1967-05-01), Wheeler
patent: 3361340 (1968-01-01), Brubaker
patent: 3723729 (1973-03-01), Kruger et al.
patent: 3761708 (1923-09-01), Roepke et al.
patent: 4251725 (1981-02-01), Adkisson

Affiliated with

Also associated with

Rating

Vacuum monitoring apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum monitoring apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum monitoring apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2333832