Vacuum microelectronics device and method for building the same

Details Vacuum microelectronics device and method for building the same Vacuum microelectronics device and method for building the same

1994-06-23

1995-05-02

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 24, 445 50, 427 77, H01J 130, H01J 902

Patent

active

054114268

ABSTRACT:
A method for producing a vacuum microelectronics device (10) on a substrate (12) and insulating dielectric (14) first forms an electrode base (16) on the insulating dielectric (14). Next, electrode base (16) is covered with a first organic spacer (42) having an aperture (44) for exposing a portion of electrode base (16). Next, a metal layer (46) is applied over organic spacer (42) to form emitter (18) within aperture (44). After removal of organic spacer (42) and metal layer (46), a second organic spacer (44) and a grid material (20) are applied over emitter (18) and electrode base (16). Next, a third organic spacer (50) and an anode metal (22) with access apertures (34) and (36) are placed over the structure. After removing organic spacers (48) and (50), anode metal (22) is sealed with metal (26) to close off access apertures (34) and (36). The result is a vacuum microelectronics device (10) usable is a triode or diode.

REFERENCES:
patent: 4943343 (1990-07-01), Bardai et al.
patent: 4983878 (1991-01-01), Lee et al.
patent: 5012153 (1991-04-01), Atkinson et al.
patent: 5077597 (1991-12-01), Mishra
patent: 5127990 (1992-07-01), Pribat et al.
patent: 5136205 (1992-08-01), Sokolich et al.

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