Vacuum microdevice and method of manufacturing the same

Details Vacuum microdevice and method of manufacturing the same Vacuum microdevice and method of manufacturing the same

1999-04-06

2000-07-25

Patel, Ashok

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

313495, 313336, 313309, 445 49, H01J 904, H01J 130

Patent

active

060930748

ABSTRACT:
A vacuum microdevice includes a first electrode, an insulating film, and a second electrode. The first electrode projects in a current radiation region on a substrate and has a sharp tip. The insulating film is formed on the surface of the first electrode except the tip of the first electrode. The second electrode is formed on the insulating film and has an electrode thickness which increases away from the tip of the first electrode.

REFERENCES:
patent: 4307507 (1981-12-01), Gray et al.
patent: 5332627 (1994-07-01), Watanabe et al.
patent: 5610471 (1999-07-01), Bandy et al.
patent: 5747926 (1998-05-01), Nakamoto et al.
patent: 5818153 (1998-10-01), Allen
patent: 5925975 (1999-07-01), Suzuki

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