Vacuum microdevice and method of manufacturing the same

Details Vacuum microdevice and method of manufacturing the same Vacuum microdevice and method of manufacturing the same

1997-03-26

1999-07-20

Achutamurthy, Ponnathapura

Electric lamp and discharge devices

Electrode and shield structures

Point source cathodes

313309, 313351, 313495, 313496, H01J 116, H01J 162

Patent

active

059259752

ABSTRACT:
A vacuum microdevice includes a first electrode, an insulating film, and a second electrode. The first electrode projects in a current radiation region on a substrate and has a sharp tip. The insulating film is formed on the surface of the first electrode except the tip of the first electrode. The second electrode is formed on the insulating film and has an electrode thickness which increases away from the tip of the first electrode.

REFERENCES:
patent: 4307507 (1981-12-01), Gray et al.
patent: 5332627 (1994-07-01), Watanabe et al.

Affiliated with

Also associated with

Rating

Vacuum microdevice and method of manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum microdevice and method of manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum microdevice and method of manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1324457