Vacuum lock handler and tester interface for semiconductor devic

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324758, G01R 3102

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active

056546319

ABSTRACT:
A semiconductor device test head docking interface system includes a test head plate juxtaposed to a test head. The tester plate includes pairs of outwardly facing spaced vacuum cups and pairs of spaced guiding and locking pins between the cups. A handler plate includes pairs of vacuum cup receiving surfaces spaced to receive the vacuum cups upon a docking of the plates, and pairs of receiving sockets spaced to receive the guiding and locking pins upon a docking of the plates. Rotary actuators are mounted on the tester plate for rotating each of the guiding and locking pins in a respective one of the receiving sockets, such that engagement and a pulling vacuum in the vacuum cups against the vacuum cup receiving surfaces and rotation of the guiding and locking pins, effects docking of the tester plate and handler plate. A Z-axis adjustment is provided in each actuator.

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inTEST, "The inTEST Handbook, A Guide to Test Head Positioning and Interfacing," Revision 4.0, available from inTEST Corporation, Western U.S. Office, Suite A, 1030 E. Duane Ave., Sunnyvale, CA 94086, Copyright 1992. (No Month Available).

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