Vacuum load lock apparatus

Details Vacuum load lock apparatus Vacuum load lock apparatus

1984-03-09

1986-12-30

Spar, Robert J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118500, 118728, 118733, 414222, C23C 1400

Patent

active

046326243

ABSTRACT:
A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which seal to a sealing plate, provide access to the cassette by outside and vacuum transport mechanisms, respectively. A right angle passthrough cassette allows orthogonal access. An improved vacuum feedthrough actuates both the upper bell jar and the internal cassette.

REFERENCES:
patent: 3874525 (1975-04-01), Hassan et al.
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4315705 (1982-02-01), Flint
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4355937 (1982-10-01), Mack et al.
patent: 4479986 (1984-10-01), Juday

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