Vacuum load lock

Details Vacuum load lock Vacuum load lock

1987-05-14

1989-08-29

Terapane, John F.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

42218606, 422906, 422907, 156345, 414217, 414222, 204298, B01J 1908, C23F 102

Patent

active

048615633

ABSTRACT:
A compact load lock and processing chamber is disclosed in which a moveable member forms a closure for both a load lock volume and an article processing volume. The moveable member is connected to fixed members by a flexible diaphragm which provides a non-sliding seal.

REFERENCES:
patent: 4149923 (1979-04-01), Uehara et al.
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4212317 (1980-07-01), Patrick et al.
patent: 4252595 (1981-02-01), Yamamoto et al.
patent: 4341582 (1982-07-01), Kohman et al.
patent: 4487678 (1984-12-01), Noguchi et al.
patent: 4563240 (1986-01-01), Shibata et al.
patent: 4618572 (1986-10-01), Lorenzelli et al.
patent: 4654106 (1987-03-01), Davis et al.
patent: 4664797 (1987-05-01), Kudo et al.
patent: 4747928 (1988-05-01), Takahashi et al.

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