Vacuum line particle detector with slab laser

Details Vacuum line particle detector with slab laser Vacuum line particle detector with slab laser

1989-11-14

1992-03-03

Rosenberger, Richard A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356336, 2502222, G01N 2100, G01V 904

Patent

active

050926756

ABSTRACT:
A particle sensing cell designed to detect the size of particles in a vacuum line for semiconductor processing equipment, a YAG plate is placed adjacent to the vacuum line conduit to define an external laser cavity extending across the conduit between an end face of the YAG plate and a mirror spaced from the end face across the conduit. The YAG plate will generate a laser beam in the shape of a sheet extending across the conduit. A cylindrical lens is positioned adjacent to the mirror to focus light scattered from particles passing through the laser beam on rectilinear photodetector arrays. Pulses generated by the array are applied to pulse amplitude measuring circuitry.

REFERENCES:
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patent: 4380392 (1983-04-01), Karabegov et al.
patent: 4457624 (1984-07-01), Goldberg et al.
patent: 4563763 (1986-01-01), Kuhn
patent: 4571079 (1986-02-01), Knollenberg
patent: 4637719 (1987-01-01), Herman
patent: 4685802 (1987-08-01), Saito et al.
patent: 4746215 (1988-05-01), Gross
patent: 4798465 (1989-01-01), Knollenberg
patent: 4842406 (1989-06-01), VonBargen
patent: 4917496 (1990-04-01), Sommer
patent: 4984889 (1991-01-01), Sommer
"The Slab Geometry Laser", William B. Jones, Laser Focus/Electro-Optics, pp. 107-114, Sep. 1983.

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