Vacuum line and a method of monitoring such a line

Details Vacuum line and a method of monitoring such a line Vacuum line and a method of monitoring such a line

2006-06-30

2009-06-09

Rogers, David A. (Department: 2856)

Measuring and testing

Blower, pump, and hydraulic equipment

C702S034000, C702S181000

Reexamination Certificate

active

07543492

ABSTRACT:
The present invention provides a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least:a pump unit comprising a pump body and a motor;a gas exhaust system;first measurement means for measuring a functional parameter relating to the motor;second measurement means for measuring a functional parameter relating to the exhaust system; andprediction means for calculating the duration of use of the vacuum line.The prediction means calculate the duration of utilization of the vacuum line prior to failure of the pump unit from the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means. In a variant, the vacuum line further includes third measurement means for measuring a functional parameter relating to the pump body, and the prediction means calculate the duration of use while taking account of the measurement of this parameter.

REFERENCES:
patent: 6178393 (2001-01-01), Irvin
patent: 6260004 (2001-07-01), Hays et al.
patent: 6619111 (2003-09-01), Soneda et al.
patent: 2003/0009311 (2003-01-01), Ushiku et al.
patent: 2003/0153997 (2003-08-01), Samata et al.
patent: 2003/0154052 (2003-08-01), Samata
patent: 2003/0158705 (2003-08-01), Ishii
patent: 2004/0064212 (2004-04-01), Samata et al.
patent: 2004/0064291 (2004-04-01), Samata et al.
patent: 2004/0143418 (2004-07-01), Ushiku et al.
patent: 2005/0091004 (2005-04-01), Parlos et al.
patent: 2005/0107984 (2005-05-01), Samata et al.
patent: 2006/0162438 (2006-07-01), Schofield et al.
patent: 0 918 159 (1999-05-01), None

Affiliated with

Also associated with

Rating

Vacuum line and a method of monitoring such a line does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum line and a method of monitoring such a line, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum line and a method of monitoring such a line will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4146792