Measuring and testing – With fluid pressure – Leakage
Patent
1981-12-28
1983-08-23
Gill, James J.
Measuring and testing
With fluid pressure
Leakage
1376361, G01M 320
Patent
active
043996906
ABSTRACT:
Equipment is monitored for leaks by a mass spectrometer responsive to a low molecular weight test gas. A diffusion pump has a foreline and an inlet connected in fluid flow relation with the spectrometer. A three position valve assembly has ports connected to a roughing pump line, to an inlet conduit for receiving test gas leaking through equipment, and to the foreline. The assembly has: (1) a vent position wherein gas from the inlet conduit is blocked from the roughing pump line and the foreline so that the inlet conduit can be vented without having gas from the inlet conduit flow to the roughing pump line and foreline, (2) a start position wherein gas from the inlet conduit flows to the roughing pump line while being blocked from the foreline, and (3) an operate position wherein gas from the inlet conduit flows to the roughing pump line and low molecular weight gas flows from the inlet conduit to the mass spectrometer through the diffusion pump and heavier gases are substantially prevented by the diffusion pump from flowing from the inlet conduit to the spectrometer. A single handle sequentially activates the valve assembly to the vent, start and operate positions while preventing direct drive from vent to operate. First and second coaxial cams are longitudinally spaced from each other along a cam shaft that is part of the handle. The first and second cams respectively engage first and second actuators for first and second valves that establish flow paths for the three positions.
REFERENCES:
patent: 2279693 (1942-04-01), Martin
patent: 3327521 (1967-06-01), Briggs
patent: 3416359 (1968-12-01), Durbin et al.
patent: 3626760 (1971-12-01), Briggs et al.
patent: 3690151 (1972-09-01), Briggs
patent: 3914983 (1975-10-01), Ichiro
patent: 3968675 (1976-07-01), Briggs
Cole Stanley Z.
Gill James J.
Herbert Leon F.
Varian Associates Inc.
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