Vacuum ionization gauge with high sensitivity

Details Vacuum ionization gauge with high sensitivity Vacuum ionization gauge with high sensitivity

2006-10-31

2006-10-31

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Using ionization effects

For analysis of gas, vapor, or particles of matter

C324S460000

Reexamination Certificate

active

07129708

ABSTRACT:
A vacuum ionization gauge (30) includes a cathode (31), an anode ring (33), a shield electrode (32), an ion educed electrode (34), a reflector (35) and a collector (36). The cathode is positioned corresponding to a first opening of the shield electrode, and the ion educed electrode is positioned corresponding to an opposite second opening of the shield electrode. An ion educed hole (341) is defined in a middle of the ion educed electrode. The reflector has a curving surface generally surrounding the second opening of the shield electrode. The collector is positioned at a center of the curving surface of the reflector and points toward the ion educed hole. The anode ring is positioned in the middle of the shield electrode. The vacuum ionization gauge is small volume and has low power consumption and improved sensitivity.

REFERENCES:
patent: 6257069 (2001-07-01), Brady et al.
patent: 2005/0030044 (2005-02-01), Correale
P.A. Redhead; New Hot-Filament Ionization Gauge With Low Residual Current; pp. 173-180, vol. 3, The Journal of Vacuum Science and Technology 1996.

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