Vacuum interface between a mini-environment pod and a piece...

Details Vacuum interface between a mini-environment pod and a piece... Vacuum interface between a mini-environment pod and a piece...

2005-08-29

2009-08-04

Fox, Charles A (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

C414S937000

Reexamination Certificate

active

07568875

ABSTRACT:
In apparatus of the invention, a transport pod (1) can be coupled to an article-passing opening (11) of process equipment (9) in leaktight manner with sealing being provided by an interposed interface peripheral gasket (16). The pod door (4) can be secured selectively to the interface door (12) so that they can be moved together as a unit along an axial stroke followed by a transverse stroke under drive from door actuator means (14). The transport pod (1) is held by retaining means (15). The peripheral volume (21) around the two doors can be pumped out by means of a pump (22) and a duct (23). The pod door (4) can be locked on the transport door (1) by locking means (20) that guarantee good sealing while the transport pod (1) is separate from the process equipment (9). This ensures good sealing of the transport pod (1), and enables the doors (4, 12) to be opened under a vacuum without polluting the inside atmosphere.

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patent: 2001/0041530 (2001-11-01), Hara
patent: 2003/0053894 (2003-03-01), Matsumoto
patent: 1 204 138 (2002-05-01), None

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