Vacuum integrated circuit

Electric lamp and discharge devices – Discharge devices having three or more electrodes – Four or more electrodes

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Details

313306, 313308, 313310, 313325, 313245, 313254, 3072991, H01J 146, H01J 2110, H01K 1100

Patent

active

047120398

ABSTRACT:
An integrated circuit including a plurality of active devices each including a thermionic cathode or a cold cathode, an anode, and a grid element, all coplanarly disposed on an insulating substrate in a vacuum. A plurality of electrostatic lens elements also are exposed on the substrate to produce electric fields that control the trajectories of electrons emitted by the cathodes to prevent the electrons from migrating to and charging up exposed portions of the substrate and the inner surface of the vacuum envelope and thereby preventing such charge buildup from altering the electrical characteristics of the active devices.

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patent: 4578614 (1986-03-01), Gray et al.

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