Books – strips – and leaves for manifolding – Book
Reexamination Certificate
2007-11-20
2007-11-20
Tyler, Cheryl (Department: 3744)
Books, strips, and leaves for manifolding
Book
C417S901000, C335S216000, C330S065000
Reexamination Certificate
active
10802064
ABSTRACT:
A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level vacuum within the chamber. Impurities, such as atmospheric air, may be purged from the chamber by evacuating the chamber to a medium level vacuum (e.g., around 10−2Torr) and subsequently filling the chamber with the gas. This purging process may be repeated multiple times to decrease the level of impurities in the gas filling the chamber. The substantially-pure gas may have an impurity-level of less than approximately 100 PPM and may comprise carbon-dioxide, although the scope of the invention is not limited in this respect. The medium level vacuum may range between approximately 1×10−2Torr and 5×10−2Torr allowing the use of a roughing pump, and the high-level vacuum may range between approximately 1×10−5and 1×10−8Torr.
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Welch, Kimo M., Capture Pumping Technology, 2001, Elsevier, 2nd edition, Chapter 5.
Sar David R.
Withrow Jerry D.
Pettitt John
Raytheon Company
Tyler Cheryl
LandOfFree
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