Refrigeration – Storage of solidified or liquified gas – Liquified gas transferred as liquid
Patent
1998-09-09
2000-08-01
Doerrler, William
Refrigeration
Storage of solidified or liquified gas
Liquified gas transferred as liquid
138114, F17C 1300
Patent
active
060949228
ABSTRACT:
A cryopump-type water-vapor removal system comprising a vacuum chamber for location within a device-fabrication cleanroom or other similar fabrication area, and a Meissner-type cryocoil for condensation of atmospheric water vapor in the atmosphere inside the chamber. A refrigerant compressor-evaporator is for location outside the device-fabrication cleanroom and is separated from the cryocoil by at least twenty feet. A refrigerant umbilical cord connects between and includes a flexible outer sheath providing for maintaining a thermal-insulation vacuum within. Flexible smooth-bore refrigerant suction and discharge tubes are disposed in the thermal-insulation vacuum of the umbilical. The suction tube has a larger diameter than the discharge to provide for an expansion of the refrigerant that occurs in the cryocoil. Non-turbulent flow through the suction and discharge tubes in the refrigerant umbilical cord may be controlled by use of a smooth-bore wall. Inside-to-outside thermal conduction may be controlled by disposing the suction and discharge tubes inside the thermal-insulation vacuum and reflective aluminized MYLAR (super insulation).
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Doerrler William
Main Richard B.
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