Vacuum holder

Details Vacuum holder Vacuum holder

1986-11-03

1987-11-17

Marbert, James B.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

B66C 102

Patent

active

047070129

ABSTRACT:
A vacuum holder which comprises a chuck provided with a recess facing a silicon wafer, a suction pipe for sucking air in the vicinity of the recess, and four separately-positioned holes penetrating the chuck in communication with the inner space of the recess.

REFERENCES:
patent: 930236 (1909-08-01), Schacht
patent: 3203725 (1965-08-01), Bitter

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