Vacuum handling especially for the use in handling silicon wafer

Details Vacuum handling especially for the use in handling silicon wafer Vacuum handling especially for the use in handling silicon wafer

1986-12-10

1988-05-17

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

B25J 1506

Patent

active

047445947

ABSTRACT:
The object of this invention relates to the technical sector of microelectronics.
The vacuum handling system according to the invention comprises a hollow body (1) of which the end takes the gripping tip forming an inside chamber (1b) with at least two annular grooves (1b1) and (1b2) for the positioning of two O rings (7) of a soft deformable material to insure, on the one hand the dismantable assembling of the part corresponding to the tip, and, on the other hand, the vacuum tightness.

REFERENCES:
patent: 954927 (1910-04-01), Burdick
patent: 1302028 (1919-04-01), Fuchs et al.
patent: 1542015 (1925-06-01), Strickland
patent: 3071402 (1963-01-01), Lasto et al.
patent: 3335727 (1967-08-01), Spoto
patent: 4212300 (1980-07-01), Meals

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