Vacuum gripping system for positioning large thin substrates...

Details Vacuum gripping system for positioning large thin substrates... Vacuum gripping system for positioning large thin substrates...

2006-03-23

2009-06-09

Chin, Paul T (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

C294S064300

Reexamination Certificate

active

07543867

ABSTRACT:
A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad. The vacuum gripper also includes a first air bearing surrounding the portion of the shaft proximal to the vacuum pad, a second air bearing surrounding the portion of the shaft distal to the vacuum pad, and an air source in fluid communication with the first air bearing and the second air bearing. The vacuum gripper further includes an exhaust port, a valve in fluid communication with the exhaust port, and a first flow restrictor in fluid communication with the valve.

REFERENCES:
patent: 5261265 (1993-11-01), Nichols
patent: 5308132 (1994-05-01), Kirby et al.
patent: 5865487 (1999-02-01), Gore et al.
patent: 6328362 (2001-12-01), Isogai et al.
patent: 6736408 (2004-05-01), Olgado et al.
patent: 7077019 (2006-07-01), Weiss et al.
patent: 2000-309423 (2000-11-01), None

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