Vacuum gettering arrangement

Details Vacuum gettering arrangement Vacuum gettering arrangement

1979-11-21

1981-10-27

Freeh, William L.

Pumps

Electrical or getter type

Getter heating, vaporizing, or regeneration

417 53, F04B 3702

Patent

active

042970822

ABSTRACT:
Vacuum gettering system includes first bulk getter 18 of zironium-aluminum alloy and having a heater 22 therein for activation. Second bulk getter 20 of porous silica glasse's is directly adjacent to getter 18 for heating activation. As vacuum enclosure 10 is pumped out, heater 22 heats both getters to activation temperature to drive off gases and vapors during low temperature enclosure baking and pumpout so that at enclosure closeoff both getters are fully activated.

REFERENCES:
patent: 2855368 (1958-10-01), Perdijk
patent: 3195716 (1965-07-01), Porta
patent: 3584253 (1971-06-01), Wintzer
patent: 3979166 (1976-09-01), Zucchinelli
patent: 4146497 (1979-03-01), Barosi et al.
"All-Glass Sorption Vacuum Trap", by F. B. Haller, The Review of Scientific Instruments, Vol. 35, No. 10, Oct. 1964.

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