Vacuum gauge of thermo-conductive type with quartz oscillator

Details Vacuum gauge of thermo-conductive type with quartz oscillator Vacuum gauge of thermo-conductive type with quartz oscillator

1989-02-15

1990-10-02

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Electrical

G01L 2112

Patent

active

049599992

ABSTRACT:
A pressure or vacuum gauge measures pressure of gas within a chamber. A quartz oscillator is disposed within the chamber for undergoing oscillation having a frequency dependent on a body temperature thereof. A constant heat source is disposed in spaced relation to or directly on the temperature-dependent quartz oscillator for heating the same to hold the body temperature thereof which is dependent on the pressure of surrounding gas. The oscillating frequency of the quartz oscillator is converted into a signal indicative of the pressure of the gas.

REFERENCES:
patent: 4638664 (1987-01-01), Tamura

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