Vacuum gauge

Details Vacuum gauge Vacuum gauge

1985-11-25

1987-03-24

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

250288, 73753, 324460, 364558, B01D 5944

Patent

active

046527524

ABSTRACT:
A vacuum gauge includes a quadrupole mass spectrometer for measuring an ion current value of respective gas components, the Bayard-Alpart type ionization gauge for measuring an apparent total pressure value of the gas components, an arithmetic logic unit for calculating a predetermined equation so as to obtain concentration of the respective gas components and also measurement sensitivity of the respective gas components, whereby the apparent total pressure value is corrected, based upon the measurement sensitivity of the respective gas components, to derive a real total pressure value of the measured gas components.

REFERENCES:
patent: 3866041 (1975-02-01), Attia
patent: 3881093 (1975-04-01), Andre et al.
patent: 4314205 (1982-02-01), Paitich et al.
patent: 4442353 (1984-04-01), Baubron
patent: 4492110 (1985-01-01), Bergquist

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