Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2008-04-29
2010-11-09
Moore, Karla (Department: 1716)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C156S345290, C156S345320, C204S298250, C204S298260, C204S298270
Reexamination Certificate
active
07828900
ABSTRACT:
A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.
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Hatanaka Masanobu
Ishikawa Michio
Lim Se-Ju
Nakamura Fumio
Arent & Fox LLP
Moore Karla
ULVAC Inc.
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