Vacuum evaporator

Details Vacuum evaporator Vacuum evaporator

2006-01-05

2008-03-04

Porta, David (Department: 2884)

Radiant energy

Source with recording detector

Using a stimulable phosphor

C250S484400

Reexamination Certificate

active

07339182

ABSTRACT:
A vacuum evaporator including a vacuum chamber and a source arranged in the vacuum chamber to supply a deposition material to a substrate on which a layer is formed. A crystal sensor measures a deposition speed of the deposition material. The crystal sensor includes an insert having a hole, and the insert is arranged in front of the crystal sensor.

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