Coating apparatus – Gas or vapor deposition – Running length work
Patent
1981-09-03
1983-04-19
Smith, John D.
Coating apparatus
Gas or vapor deposition
Running length work
118715, 118730, 55385R, 204298, C23C 1310
Patent
active
043802117
ABSTRACT:
A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.
REFERENCES:
patent: 2332309 (1943-10-01), Drummond
patent: 3368523 (1968-02-01), Becker
patent: 4205623 (1980-06-01), Mahl
patent: 4223048 (1980-09-01), Engle, Jr.
patent: 4228004 (1980-10-01), Foster
Chern, "Improved Design for CVD Reactor", Insulation/Circuits, vol. 26, No. 12, Nov. 1980, pp. 62-63.
Matsushita Electric - Industrial Co., Ltd.
Plantz Bernard F.
Smith John D.
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