Coating processes – Electrical product produced – Carbon coating
Patent
1996-12-31
1999-03-02
King, Roy V.
Coating processes
Electrical product produced
Carbon coating
427249, 423445R, 423DIG40, C23C 1424
Patent
active
058767908
ABSTRACT:
According to the present invention, a method and apparatus are provided for growing C.sub.60 thin film or films having a high degree of textured crystallinity using vacuum evaporation with a high deposition rate onto the substrate maintained at substantially high temperature. The method includes producing a thin film of C.sub.60 with high degree of textured crystallinity on the substrate using a vacuum evaporation system having the steps of using a metal substrate; operating the substrate at a high temperature of during the growth or deposition period; and ensuring that the deposition rate of C.sub.60 onto the substrate be high.
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King Roy V.
Ormat Industries Ltd.
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