Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1991-02-28
1992-06-16
Bueker, Richard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427250, 118726, 118727, 21912115, C23C 1430
Patent
active
051223899
ABSTRACT:
Two heat-resistant rollers are located close to each other such that rotation shafts of the two heat-resistant rollers are approximately parallel to each other, and parts of the two heat-resistant rollers are immersed in a deposition material, which has been molten in a crucible. The two heat-resistant rollers are rotated in opposite directions. Parts of the molten deposition material are entrained by the circumferential surfaces of the two heat-resistant rollers, and a concave part of the molten deposition material is formed at a region, at which the entrained parts of the molten deposition material come into contact with each other. An electron beam is irradiated to the concave part of the molten deposition material. The molten deposition material is thereby evaporated from the concave part such that the resulting stream of vapor of the molten deposition material may be directed at an oblique angle or approximately horizontally with respect to the surface of the molten deposition material in the region other than the region in which the two heat-resistant rollers are located. A thin film of the deposition material is thus deposited on the substrate.
REFERENCES:
patent: 4516525 (1985-05-01), Bourgeois
patent: 4620081 (1986-10-01), Zeren
patent: 4632059 (1986-12-01), Flatscher
Bueker Richard
Fuji Photo Film Co. , Ltd.
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