Vacuum evaporation apparatus and method for making vacuum evapor

Details Vacuum evaporation apparatus and method for making vacuum evapor Vacuum evaporation apparatus and method for making vacuum evapor

1990-11-28

1992-07-21

Albritton, C. L.

Electric heating

Metal heating

By arc

118719, 21912116, B23K 1500

Patent

active

051325063

ABSTRACT:
A vacuum evaporation apparatus has a melting pot containing evaporating material therein and a movable partition. A surface of the evaporating material is separated into a supplying surface (whereinto a Cr-Co material rod of replenishing material is supplied) and an evaporating surface (whereonto an electron beam is irradiated) by the partition only during deposition of evaporating material onto a substrate. After finish of the deposition, the partition is lifted and is apart from the surface.

REFERENCES:
patent: 3432335 (1969-03-01), Schiller et al.
patent: 3467058 (1969-09-01), Box et al.

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