Vacuum evaporation apparatus

Details Vacuum evaporation apparatus Vacuum evaporation apparatus

1978-06-27

1980-08-19

Kendall, Ralph S.

Coating apparatus

Gas or vapor deposition

With treating means

118726, 4272481, C23C 1308

Patent

active

042178568

ABSTRACT:
The vacuum evaporation apparatus comprises a housing having walls defining n evacuable evaporation chamber with an evaporator in the chamber disposed below a supporting structure for the substance to be coated and including an annular screen disposed around the evaporator between the evaporator and the walls of the housing so that only an opening or angle between the evaporator and the supporting structure is left which is sufficient for the vapor deposition of the substrates. The screen is of a material which may be heated, such as a metal material, which may be electrically heated.

REFERENCES:
patent: 2440135 (1948-04-01), Alexander
patent: 2445310 (1948-07-01), Chilowsky
patent: 2469929 (1949-05-01), Osterberg et al.
patent: 2793609 (1957-05-01), Shen et al.
patent: 2938816 (1960-05-01), Gunther
patent: 3070879 (1963-01-01), Seale
patent: 3325628 (1967-06-01), Valley et al.
patent: 3344768 (1967-10-01), Jennings
patent: 3396696 (1968-08-01), Becker
patent: 3571478 (1971-03-01), Teagan
patent: 3617348 (1971-11-01), Kelley et al.
patent: 3649339 (1972-03-01), Smith
patent: 3800738 (1974-04-01), Tassara
patent: 4046101 (1977-09-01), Winkler

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