Vacuum evaporating apparatus utilizing multiple rotatable cans

Details Vacuum evaporating apparatus utilizing multiple rotatable cans Vacuum evaporating apparatus utilizing multiple rotatable cans

1983-05-26

1984-06-19

Smith, John D.

Coating apparatus

Gas or vapor deposition

Running length work

118719, 118720, 118726, 118730, 118733, C23C 1310

Patent

active

044548362

ABSTRACT:
An apparatus for vacuum evaporating magnetic material onto a base. Cylindrical cans are disposed parallel to one another and rotated either in the same or opposite directions. A tape-shaped base is wound around the cans passing from an upper vacuum chamber to a lower vacuum chamber. A vacuum evaporation source is positioned in the lower chamber and directed to the tape-shaped base in a predetermined area on both sides of a gap between the cans or a line contact area between the cans.

REFERENCES:
patent: 2664853 (1954-01-01), Schuler
patent: 2719094 (1955-09-01), Clough et al.
patent: 2925062 (1960-02-01), Schwindt
patent: 3044438 (1962-07-01), Osswald et al.
patent: 3227132 (1966-01-01), Clough et al.
patent: 3498259 (1970-03-01), Braguier
patent: 3683847 (1972-08-01), Carleton
patent: 3854442 (1974-12-01), Adam et al.
patent: 4220117 (1980-09-01), Shinohara

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