Vacuum evacuation system

Details Vacuum evacuation system Vacuum evacuation system

1987-06-05

1989-01-10

Freeh, William L.

Pumps

Diverse pumps

Including rotary nonexpansible chamber type

417205, 418201, F04B 3714, F04B 2308

Patent

active

047970685

ABSTRACT:
A vacuum evacuation system comprising a non-positive displacement type vacuum pump called molecular pump which obtains high pumping speed in a high vacuum range, and an oil-free, positive displacement type vacuum pump called screw vacuum pump. The non-positive displacement type vacuum pump and the positive displacement type vacuum pump are connected to each other such that the non-positive displacement type vacuum pump is located on a high vacuum side and the positive displacement type vacuum pump is located on a low pressure or atmospheric side, to thereby prevent oil from being penetrated into a system to be evacuated.

REFERENCES:
patent: 1927799 (1933-09-01), Mann
patent: 2926835 (1960-03-01), Lorenz
patent: 3066849 (1962-12-01), Beams
patent: 3104802 (1963-09-01), Elkberg
patent: 3112869 (1963-12-01), Aschoff
patent: 3924962 (1975-12-01), Maurice
patent: 4090815 (1978-05-01), Nakamura
patent: 4655678 (1987-04-01), Miki

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