Vacuum dispense method for dispensing an encapsulant and machine

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Encapsulating

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438106, 438121, H01L 2144, H01L 2148, H01L 2150

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active

060460768

ABSTRACT:
A microelectronic assembly such as an assembly of a semiconductor chip and mounting substrate is encapsulated by applying an encapsulant to the assembly while maintaining the assembly under a subatmospheric pressure to minimize gas entrapment in the encapsulant. After the encapsulant flow around the assembly, a higher pressure is applied, causing collapse of any voids in the encapsulant. The encapsulant is then cured. The method is particularly useful with assemblies wherein a chip is spaced from the substrate so that the encapsulant flows between the chip and substrate.

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