Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2005-01-24
2010-10-05
Hassanzadeh, Parviz (Department: 1716)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S730000, C156S345430, C156S345440, C156S345450, C156S345460, C156S345470, C156S345540, C156S345550
Reexamination Certificate
active
07806985
ABSTRACT:
An improvement has been made in contact states between a rotating electrode arranged inside a vacuum chamber and a power supply mechanism which touches the rotating electrode to supply electric power thereto. A vacuum device is provided with a vacuum chamber, a rotating electrode arranged inside and electrically insulated from the vacuum chamber, and a power supply mechanism which touches the rotating electrode to supply electric power thereto, wherein the rotating electrode has an annular shape and horizontally rotates with respect to the center axis of the annular shape, and the power supply mechanism is composed of electrode members, and the electrode member and the rotating electrode come into contact with each other at at least one contact surface.
REFERENCES:
patent: 2003/0104142 (2003-06-01), Murakami et al.
patent: 54-158643 (1979-12-01), None
patent: 59-206174 (1984-11-01), None
patent: 2001/073136 (2001-03-01), None
patent: 2004-053681 (2004-02-01), None
International Search Report (Application No. PCT/JP2005/000852) Dated May 17, 2005.
International Preliminary Examtnation Report dated Jan. 25, 2007 for Application No. PCT/JP2005/000852.
Abe Tatsumi
Aonahata Kazuhito
Fuse Yutaka
Komuro Hiroyuki
Takimoto Masayuki
Dhingra Rakesh
Hassanzadeh Parviz
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Showa Shinku Co., Ltd.
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