Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-05-24
2011-05-24
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C417S062000, C355S053000, C250S50400H
Reexamination Certificate
active
07948603
ABSTRACT:
The exposure apparatus100comprises a double shell structure which has an upper vacuum chamber140on the outside of the reticle chamber135,and a lower vacuum chamber160on the outside of the wafer chamber155. A cryo pump CP and a turbo molecular pump TMP/dry pump DP are connected in parallel to each of the chambers, i.e., the reticle chamber135and wafer chamber155. During exposure operation and alignment of the exposure apparatus100,only the cryo pump CP (vibration-free type vacuum pump) is operated; the turbo molecular pump TMP/dry pump DP (vibrating type vacuum pump) is stopped. As a result, it is possible to cut off the transmission of vibration from the vibrating type vacuum pump during exposure operation and alignment of the exposure apparatus, so that the precision of the stage devices137and157can be ensured to a much greater degree; accordingly, deterioration of the exposure performance can be reduced to a much greater extent.
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Holtz Holtz Goodman & Chick PC
Nguyen Hung Henry
Nikon Corporation
Whitesell-Gordon Steven H
LandOfFree
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