Vacuum deposition through plural masks on plural substrates

Coating apparatus – With cutting – punching or tearing of work – Web or sheet work

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427259, 427294, C23C 1312

Patent

active

040361713

ABSTRACT:
Apparatus for the vacuum deposition of a plurality of successive layers on each of a plurality of substrates, comprises a vacuum chamber having selectively shieldable cups for heating and evaporating the material to be deposited, and a pair of relatively rotatable plates suspended in the vacuum chamber, the one plate to carry at least one circular series of substrates, and the other plate to carry at least one circular series of masks selectively and sequentially registrable with the substrates and through which the successive layers are applied. Means are provided for moving the plates toward and away from each other, for rotating them continuously conjointly, and for rotating them selectively relatively stepwise.

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patent: 3598083 (1971-08-01), Dort et al.
patent: 3853091 (1974-12-01), Christensen et al.

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